F450C News and Information

  • F450C

  • About F450C

  • The Facilities 450mm Consortium (F450C) is a first-of-its-kind partnership at SUNY’s College of Nanoscale Science and Engineering (CNSE) at SUNY Polytechnic Institute (SUNY Poly) that is leading the global effort to design and build next-generation 450mm computer chip fabrication facilities. The collaboration includes 10 of the world’s leading nanoelectronics facility companies, including Air Liquide, Busch, CH2M, CS CLEAN SYSTEMS, Edwards, M+W Group, Ovivo, Peek Process Insights, Inc, Pfeiffer Vacuum and Swagelok. Members of F450C are working closely with the Global 450mm Consortium (G450C), as announced by New York Governor Andrew M. Cuomo, to identify viable solutions required for 450mm high-volume facility construction, with initial focus areas to include reducing tool installation cost and duration, and improving facility sustainability.
  • Along with the SEMI Standardization working group, the F450C will focus on Standard connections, streamlined installation, and EHS improvements.
  • Some Top facilities project interest areas
  •    Utility right sizing
  •    Gas interface boxes, VMBs, cooling water manifolds, etc.
  •    Minimize facilities POCs
  •    Standard hookups for power, PCW, CDA, PV, GN2, exhaust, datacom
  •    Improved AMC detection/response
  •    Pumps and pump frames, etc.
  •    He recycling (Backside cooling ), H2 recycling (EUV)