450mm Publications

Document Number Document Name Publication Date
G450C SEMICON Europa 2015 10/07/2015
G450C SEMICON Japan 2014 Update 12/11/2014
G450C SEMICON Europa 2014 Update 10/08/2014
G450C Equipment Performance Metrics (EPM) Published Guidelines for Sub-10nm July 2014 07/30/2014
Rethinking the Approach to Higher 450mm Process Gas Flows: A Case Study 05/19/2014
Rethinking the Approach to Higher 450mm Process Gas Flows: A Case Study (POSTER) 05/19/2014
450mm Metrology and Inspection: The Current State and the Road Ahead - PowerPoint 05/13/2014
450mm Metrology and Inspection: The Current State and the Road Ahead 05/13/2014
G450C Component Lift Guidelines 031114 03/10/2014
G450C/F450C Collaborative Workshop 10/23/2013
G450C Standardization Workshop 03/12/2013
450mm Back End Material Handling System Guidelines 10/25/2012
450 mm Demonstration Test Method (DTM) 01/18/2012
SEMI S23 Application Guide and Total Equivalent Energy (TEE) CalcII User's Guide 11/8/2010
Guideline for Environmental Characterization of Semiconductor Process Equipment - Revision 2 12/10/2009
Application Guide for Manual Material Handling Requirements in SEMI S8 12/7/2009
Combustible Materials Test Report 08/13/2009
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